Enhancing Signal Quality of Capacitive Displacement Measurements in Machine Tool Environments
نویسندگان
چکیده
منابع مشابه
Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts
Metrology applications commonly require non-contact, capacitive sensors for displacement measurements due to their nanometer resolution. In some metrology applications, for example, the measurement of roundness and spindle error motion, the displacements of stationary and rotating cylindrical artifacts are measured. Error from using a conventionally calibrated sensor with a non-flat (e.g., cyli...
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Capacitive displacement sensors are widely used in precision manufacturing and metrology because they measure displacements with nanometer resolution. Prior literature usually treats capacitive sensors consisting of electrodes arranged as parallel plates. In this work, the target electrode is spherical, which is common in machine tool metrology, spindle metrology, and the measurement of spheric...
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ژورنال
عنوان ژورنال: Journal of Manufacturing and Materials Processing
سال: 2019
ISSN: 2504-4494
DOI: 10.3390/jmmp3030076